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Perfluoroelastomers (MOSEZ)

Perfluoroelastomers (MOSEZ)
Overview

Perfluoroelastomer O-rings are high-performance sealing materials that provide excellent resistance to high temperatures, chemicals, and various gases. They are mainly used in the petrochemical, semiconductor, and aerospace industries, delivering stable performance even in extreme environments. Although costly, they offer long service life and high reliability.

Features
  • 01

    They exhibit outstanding resistance to most chemicals, solvents, acids, alkalis, and high-temperature gases, making them suitable for use in harsh conditions.

  • 02

    They maintain their physical properties and operate reliably even at high temperatures exceeding 300°C.

  • 03

    They withstand high pressure and abrasion, ensuring consistent performance over long periods.

  • 04

    They possess high durability in plasma environments generated during semiconductor manufacturing processes, allowing use without performance degradation.

MOSEZ® Application Guide for Perfluoroelastomer Products
Process MOSEZ Ⓡ Max. Temp. DuPont™ Kalrez Ⓡ GreeneTweed™ Chemraz Ⓡ MOS™ MOSEZ Ⓡ Features
HDPCVD
PECVD
SACVD
300 ℃ 9100 3060DB Low erosion rate and ultra-low particle generation in oxygen and fluorine-based plasma
HDPCVD
PECVD
300 ℃ 8085 3070E Specifically manufactured to minimize particle generation in NF3 plasma
LPCVD
RTP
300 ℃ 8475 3070Ⅰ Reduced low gas emission and improved compression set resistance
Wet
Process
275 ℃ 6375 2780B Wide chemical resistance and heat resistance
Oxidation
Diffusion
MCVD
ALD, LPCVD
320 ℃ 8900 3280B Wide chemical resistance and heat resistance
CVD
RPCVD
APCVD
DCVD
230 ℃ E38 2380W Resistant to various aggressive chemicals with superior physical properties